Design of Mechanically Tunable Optical Filters With Microring Resonators

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Date

2015

Journal Title

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Volume Title

Publisher

Institute of Electrical and Electronics Engineers Inc.

Open Access Color

Green Open Access

No

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Abstract

Design strategies for the mechanically tunable optical filters with microring resonators and comb-drive actuators are discussed. Electromechanical simulation results are combined with the electromagnetic analysis of the device. A method to design comb-drive actuators to achieve linear resonant wavelength-voltage characteristics is presented. © 2015 Elsevier B.V., All rights reserved.

Description

CMP; et al.; IEEE Components, Packaging and Manufacturing Technology Society (CPMT); La Region Languedoc Roussillon; LIRMM; Universite Montpellier
Hah, Dooyoung/0000-0002-1290-0597

Keywords

Actuators, Combdrive, Microring Resonators, Tunable Optical Filters, Actuators, Design, Fiber Optic Sensors, Optical Filters, Optical Resonators, Resonators, Comb-Drive Actuator, Combdrive, Electromagnetic Analysis, Electromechanical Simulations, Microring Resonator, Resonant Wavelengths, Tunable Optical Filters, Voltage Characteristics, Electromechanical Devices

Fields of Science

0103 physical sciences, 02 engineering and technology, 0210 nano-technology, 01 natural sciences

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OpenCitations Citation Count
3

Source

-- 17th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015 -- Montpellier -- 115667

Volume

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1

End Page

5
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