Scopus İndeksli Yayınlar Koleksiyonu
Permanent URI for this collectionhttps://hdl.handle.net/20.500.12573/395
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Conference Object Quasi-Static Operation of 2-Axis Microscanners With AlN Piezoelectric Quad-Actuators(Institute of Electrical and Electronics Engineers Inc., 2021-08-25) Hah, D.Aluminum nitride (AlN) started to draw attentions as a material for piezoelectric actuation owing to its CMOS process compatibility and safeness for biomedical applications. Due to its relatively low piezoelectric coefficients, AlN-based piezoelectric actuators have been mostly operated in resonance modes, especially in optical scanning. This paper presents a novel design of a 2-axis-tilt microscanner with AlN piezoelectric quad-actuators and meander-shaped hinges for reasonable quasi-static operation. Through finite-element-method simulation, it is shown that the proposed device can have about 9 degree of optical scan angle in two dimensions with the voltage amplitude of 50 V. Lissajous scanning operation of the device is demonstrated as well via simulation. © 2021 Elsevier B.V., All rights reserved.Article Citation - Scopus: 1AlN Piezoelectric Quad-Actuators for 2D Optical Micro Scanning(Taylor & Francis Ltd, 2022) Hah, DooyoungPiezoelectric actuation has been one of the frequent choices for optical micro scanning. In most of the cases, lead zirconate titanate (PZT) has been used as the piezoelectric material. However, PZT has a potential issue in biomedical applications due to the content of lead. For this, AlN can be used as an alternative. The main drawback of AlN is its low piezoelectric coefficients. In order to overcome such a drawback, this paper presents a novel actuator configuration, designed for a quasi-static operation mode. Quad-actuators and meander-shaped hinges are the essence of the proposed actuator configuration. Numerical simulation study is carried out to prove the concept of the device. The study also shows that the proposed scanner can have the optical scan angle of 9 degree at a quasi-static mode. Two different scan modes, a raster-like mode and a Lissajous mode are tested, demonstrating the two-dimensional scanning capability of the device.