WoS İndeksli Yayınlar Koleksiyonu
Permanent URI for this collectionhttps://hdl.handle.net/20.500.12573/394
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Article Citation - WoS: 3Citation - Scopus: 3RF MEMS Variable Attenuators With Improved dB-Linearity(Springer Heidelberg, 2023-02-22) Hah, DooyoungA variable attenuator is one of the essential components in radio frequency (RF) systems, such as automatic gain control amplifiers and full-duplex systems. Variable attenuators based on microelectromechanical systems (MEMS) technology have several advantages over the semiconductor counterparts, including low power consumption and suppressed harmonics. Attenuation can be realized by disruption of signal propagation, which is induced by moving electrodes placed next to a signal line. In this work, the effect of the moving electrodes on the RF characteristics of the variable attenuators is studied via numerical simulation. It is observed that 10 lm of moving electrode displacement can result in 18 dB of attenuation dynamic range at 20 GHz. The similar type of RF MEMS variable attenuators reported previously showed substantial nonlinearity in attenuation-voltage characteristics, which becomes a serious drawback for applications where high-precision attenuation management is required. The main objective of the current study is, therefore, to achieve high dB-linearity, by employing shaped-finger comb-drive actuators in the moving electrode displacement control. In addition, a nonlinear relationship between force and displacement in a clamped-clamped beam spring is taken into account for more accurate device modelling. Through finite element analysis, it is shown that an improvement by a factor of twelve can be obtained in dB-linearity by using a single-comb shaped-finger actuator, compared to standard straight-finger comb-drives. The study also shows that the dB-linearity can be further (2.2 times additionally) improved by utilizing dual-comb shaped finger actuators.Article Citation - WoS: 1Citation - Scopus: 1Electret Vibration Energy Harvesters With Symmetrically Configured Curved-Beam Hinges(Springer Heidelberg, 2024-03) Hah, DooyoungFor vibration energy harvesters, broadband power spectral characteristics are often desirable. One way of achieving broadband spectrum is to employ curved-beam hinges, utilizing their nonlinear spring characteristics. In our previous study, electret-based vibration energy harvesters employing curved-beam hinges were investigated via numerical analysis based on stochastic differential equations and colored-noise inputs. It showed that the harvesters with curved-beam hinges can produce higher power than the ones with ordinary straight beams when the external acceleration is between 0.02g and 0.05g. It was also learned that the straight-beam device, a Duffing oscillator, performs better than the curved-beam device, a Duffing-Holmes oscillator, at higher acceleration (>= 0.1g\documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$$\ge 0.1g$$\end{document}). Since the energy harvesting efficiency is one of the most important performance indicators, continuous search for novel configurations with improved efficiency is needed. For that purpose, a symmetric configuration of curved-beam hinges (a Duffing oscillator) is proposed in this work, in contrast to the previously reported one with an asymmetric configuration (a Duffing-Holmes oscillator). This study shows, via numerical analysis, that the symmetric configuration can produce higher (up to 7.3% more) power outputs for the external acceleration magnitude higher than 0.1g, when compared to an asymmetric configuration. The study results also show that it can produce higher power outputs (up to 4.5 times) than the harvesters employing ordinary straight-beam hinges.Conference Object Citation - WoS: 3Citation - Scopus: 3Analytical Design of MEMS Variable Capacitors Based on Shaped-Finger Comb-Drives(Springer Heidelberg, 2019-02-23) Hah, DooyoungA variable capacitor is one of the widely used components in radio frequency (RF) circuits. Variable capacitors can benefit from the microelectromechanical systems (MEMS) technology, to be equipped with attractive characteristics such as high quality factor and wide tuning range. One of the design goals for MEMS varactors has been to realize linear capacitance-voltage (C-V) characteristics, for which a design method is proposed in this paper, based on shaped-finger comb-drive actuators. The shaped-finger design method, originally developed for a tunable optical filter application by the author, is redeveloped in this work for a linear C-V varactor. Moreover, the conformal mapping method is employed in calculation of capacitances, making the whole design process more time-efficient, being almost all-analytical with the minimum usage of numerical analysis methods. Effects of sense capacitor finger shapes to the optimized drive capacitor finger shapes and the corresponding C-V characteristics are investigated as well. Variable capacitors with the shaped-finger design show linearity factor (LF)-defined as the maximum deviation from the perfect linear relationship-as good as 0.4%, enormously improved from that of the conventional constant-finger-gap devices (LF: 49.9%). Further probed by 3-D numerical analysis, the C-V characteristics of the designed variable capacitor show LF better than 2.62% in the case of constant-gap sense capacitors, and as good as 0.77% in the case of shaped-finger sense capacitors. Versatility of the design method is further demonstrated by presenting a varactor for linear resonant frequency-voltage (f-V) characteristics in voltage-controlled oscillator (VCO) applications. Finally, effects of etch bias, one of common fabrication imperfections, to the linearity of C-V characteristics are studied. The developed analytical design method with shaped fingers can find a wide range of applications where comb-drive actuators are used.