Hah, Dooyoung2025-09-252025-09-2520169781509014576https://doi.org/10.1109/DTIP.2016.7514884https://hdl.handle.net/20.500.12573/3589BME Viking; Budapesti Muszaki es Gazdasagtudomanyi Egyetem; CMP; IEEE Components, Packaging and Manufacturing Technology Society (CPMT); Laboratoire d'Informatique, de Robotique et de Microelectronique de Montpellier (LIRMM); University of MontpellierUtilizing the Vernier effect, series coupling of multiple microring resonators with different sizes is used to design a wide-band (free spectral range: 36 nm) tunable filter. For index modulators that shift the filter spectrum by changing effective indices through evanescent coupling, silicon waveguides are considered, which make the fabrication simpler. Effects of the index modulator width to the filter characteristics are studied. A narrower modulator (width: 50 nm) does not incur much loss to the resonator, but requires hopping among several bands since its tuning effect is moderate. On the other hand, a wider modulator (width: 100 nm) can cover the full free spectral range without band hopping, but induces severe loss when it is close to the resonator. The shaped-finger comb-drive actuator design method is applied to obtain linear drop channel control. © 2017 Elsevier B.V., All rights reserved.eninfo:eu-repo/semantics/closedAccessComb-Drive ActuatorMicroring ResonatorShaped FingerTunable Optical FilterVernier EffectActuatorsBandpass FiltersDesignFiber Optic SensorsModulatorsOptical FiltersOptical ResonatorsResonatorsWaveguide FiltersComb-Drive ActuatorMicroring ResonatorShaped FingerTunable Optical FiltersVernier EffectComb FiltersConference Object10.1109/DTIP.2016.75148842-s2.0-84979976540