Hah, Dooyoung2023-05-082023-05-082021978-1-6654-0230-9WOS:000786783000025https://doi.org/10.1109/DTIP54218.2021.9568679https://hdl.handle.net/20.500.12573/1593Aluminum nitride (AlN) started to draw attentions as a material for piezoelectric actuation owing to its CMOS process compatibility and safeness for biomedical applications. Due to its relatively low piezoelectric coefficients, AlN-based piezoelectric actuators have been mostly operated in resonance modes, especially in optical scanning. This paper presents a novel design of a 2-axis-tilt microscanner with AlN piezoelectric quad-actuators and meander-shaped hinges for reasonable quasi-static operation. Through finite-elementmethod simulation, it is shown that the proposed device can have about 9 degree of optical scan angle in two dimensions with the voltage amplitude of 50 V. Lissajous scanning operation of the device is demonstrated as well via simulation.enginfo:eu-repo/semantics/closedAccessMicroscannerpiezoelectric actuatoraluminum nitrideconferenceObject