Hah, DooyoungBordelon, John2023-08-152023-08-152015978-1-4799-8625-5WOS:000380516700046https://doi.org/10.1109/DTIP.2015.7161007https://hdl.handle.net/20.500.12573/1698Meeting:Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Location:Montpellier, FRANCE Date:APR 27-30, 2015Design strategies for the mechanically tunable optical filters with microring resonators and comb-drive actuators are discussed. Electromechanical simulation results are combined with the electromagnetic analysis of the device. A method to design comb-drive actuators to achieve linear resonant wavelength-voltage characteristics is presented.enginfo:eu-repo/semantics/closedAccessmicroring resonatorscombdrive actuatorstunable optical filtersconferenceObject15